JPS6324937B2 - - Google Patents

Info

Publication number
JPS6324937B2
JPS6324937B2 JP59217347A JP21734784A JPS6324937B2 JP S6324937 B2 JPS6324937 B2 JP S6324937B2 JP 59217347 A JP59217347 A JP 59217347A JP 21734784 A JP21734784 A JP 21734784A JP S6324937 B2 JPS6324937 B2 JP S6324937B2
Authority
JP
Japan
Prior art keywords
base material
quartz glass
seed rod
spherical portion
porous quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59217347A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6197140A (ja
Inventor
Masaaki Ikemura
Susumu Hachiuma
Katsunari Ochiai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP21734784A priority Critical patent/JPS6197140A/ja
Publication of JPS6197140A publication Critical patent/JPS6197140A/ja
Publication of JPS6324937B2 publication Critical patent/JPS6324937B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01486—Means for supporting, rotating or translating the preforms being formed, e.g. lathes
    • C03B37/01493—Deposition substrates, e.g. targets, mandrels, start rods or tubes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1484—Means for supporting, rotating or translating the article being formed
    • C03B19/1492—Deposition substrates, e.g. targets

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
JP21734784A 1984-10-18 1984-10-18 改良された多孔質石英ガラス母材製造用種棒 Granted JPS6197140A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21734784A JPS6197140A (ja) 1984-10-18 1984-10-18 改良された多孔質石英ガラス母材製造用種棒

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21734784A JPS6197140A (ja) 1984-10-18 1984-10-18 改良された多孔質石英ガラス母材製造用種棒

Publications (2)

Publication Number Publication Date
JPS6197140A JPS6197140A (ja) 1986-05-15
JPS6324937B2 true JPS6324937B2 (en]) 1988-05-23

Family

ID=16702748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21734784A Granted JPS6197140A (ja) 1984-10-18 1984-10-18 改良された多孔質石英ガラス母材製造用種棒

Country Status (1)

Country Link
JP (1) JPS6197140A (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010098352A1 (ja) 2009-02-24 2010-09-02 旭硝子株式会社 多孔質石英ガラス体の製造方法およびｅｕｖリソグラフィ用光学部材
WO2011021609A1 (ja) 2009-08-19 2011-02-24 旭硝子株式会社 ＴｉＯ2を含有するシリカガラスおよびＥＵＶリソグラフィ用光学部材
WO2011068100A1 (ja) 2009-12-04 2011-06-09 旭硝子株式会社 インプリントモールド用石英系ガラス基材の製造方法およびインプリントモールドの製造方法
EP2399873A1 (en) 2010-06-28 2011-12-28 Asahi Glass Company, Limited Method for producing glass body and method for producing optical member for EUV lithography

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57135737A (en) * 1981-02-13 1982-08-21 Showa Electric Wire & Cable Co Ltd Starting material for manufacturing of optical fiber by v.a.d. process
JPS58135147A (ja) * 1982-02-08 1983-08-11 Hitachi Ltd 光フアイバ母材の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010098352A1 (ja) 2009-02-24 2010-09-02 旭硝子株式会社 多孔質石英ガラス体の製造方法およびｅｕｖリソグラフィ用光学部材
WO2011021609A1 (ja) 2009-08-19 2011-02-24 旭硝子株式会社 ＴｉＯ2を含有するシリカガラスおよびＥＵＶリソグラフィ用光学部材
WO2011068100A1 (ja) 2009-12-04 2011-06-09 旭硝子株式会社 インプリントモールド用石英系ガラス基材の製造方法およびインプリントモールドの製造方法
EP2399873A1 (en) 2010-06-28 2011-12-28 Asahi Glass Company, Limited Method for producing glass body and method for producing optical member for EUV lithography

Also Published As

Publication number Publication date
JPS6197140A (ja) 1986-05-15

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees